Ponente
Descripción
This study presents the use of Twist Substrate-Assisted Glancing Angle Deposition (TSA-GLAD) for the fabrication of nanocolumnar aluminum-doped zinc oxide (AZO) thin films on borosilicate glass substrates. The TSA-GLAD technique combines radio-frequency sputtering with controlled precession substrate rotations at several speeds and a twist frequency of 0.5 Hz over a 40-minute deposition period. A remarkable reduction in solar weighted reflectance (SWR) from 20 % in single-layer films to as low as 13 % in multilayer configurations, indicated superior anti-reflective capabilities. The films maintain over 80 % transparency in the visible spectrum. Additionally, the average porosity of the films was quantified between 12 and 14.5 % for samples with different rotational directions, which highlight the influence of substrate rotation on structural properties of the AZO thin films. The findings reveal the TSA-GLAD technique is capable of enhancing the optical properties of AZO thin films. Future challenges include refining morphology control, exploring different substrates, and assessing durability under varying environmental conditions for practical applications in solar cells and smart windows.
